Demystifying the "source of error" of the stage

After assembly, the error of the stage is basically unchanged under fixed environmental conditions. To reduce the errors of the stage, you must find out the sources of errors that affect the stage. Error sources mainly include principle errors, manufacturing errors, and operating errors.

The principle error is the error caused by the imperfect theory of the applied working principle or the use of approximate theory. Manufacturing error refers to the error produced by each part in the stage during the manufacturing process. When designing parts, attention should be paid to the principle of uniformity of the base surface to reduce manufacturing errors. Operating error refers to errors caused by deformation of parts, friction between parts, temperature, etc. during the operation of the stage. Figure (2) is the error source in the stage.

Figure 2 Error source of the stage

Fig.2 Error Sources of Displacement Instrument

Calculation and Analysis of Positioning Accuracy Error of Translation Stage

Based on the source of the operating error and the accuracy analysis as a guide. A stepwise approach is adopted to distribute accuracy reasonably. Figure (3) is a simplified diagram of the stage structure.

Figure 3 Schematic diagram of the stage

Fig.3 Structure Sketch of Displacement Instrument

The precision equation and uncertainty equation [9] of the workbench are:

(1) The first step in the formula affects the accuracy of the stepper motor on the table motion accuracy; the second term is the effect of the positioning screw.

The precision transfer functions are:

Structure parameter accuracy

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